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The measure accuracy depends on the measure distance. The closer the better. For a typical accuracy, please measure the distance from the “Center Laser Beam Lens” to the plate. The accuracy depends also on the measure length on the plate and the material of the plate. Please have a look at the table below.

Model: VC nano 3D Z 630 regular:

Measure length 30mm:

Distance Z [mm]	80	90	100	110	120	130	140	150	160	170	180	190	200	210	220	230	240	250	260	270	280	290	300	310	320
Delta Phi [degrees]	0.02	0.02	0.03	0.03	0.04	0.05	0.05	0.06	0.07	0.07	0.08	0.09	0.09	0.10	0.11	0.11	0.12	0.13	0.13	0.14	0.15	0.15	0.16	0.17	0.17
Detection Points	429	396	367	343	321	303	286	271	257	245	234	224	214	206	198	190	184	177	171	166	161	156	151	147	143

Measure length 20mm:

Distance Z [mm]	80	90	100	110	120	130	140	150	160	170	180	190	200	210	220	230	240	250	260	270	280	290	300	310	320
Delta Phi [degrees]	0.02	0.03	0.04	0.05	0.06	0.07	0.08	0.09	0.10	0.11	0.12	0.13	0.14	0.15	0.16	0.17	0.18	0.19	0.20	0.21	0.22	0.23	0.24	0.25	0.26
Detection Points	286	264	245	229	214	202	190	180	171	163	156	149	143	137	132	127	122	118	114	111	107	104	101	98	95